Vacuum Feedthroughs, Heating Elements, and Custom Thermal Systems for
Aerospace, University Research, Semiconductor, Medical and OEM Applications

Hot Chuck 300mm Heater

Hot Chuck Heater 300mm

Used for semiconductor wafer heating. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish.

Design includes a proprietary internal element patterns, notches, and thermocouple holes, as well as adding additional manufacturing steps to provide the 2-3 Ra µin finish.

Specifications

  • Temperature uniformity +/- 1%
  • 50°C - 450°C Temperature range
  • "Mirror" surface finish of 2-3 Ra µin
  • Hard coat Anodize
  • 6061 T6 Aluminum
  • 20 Meg-ohm isolation at 1000 VDC
  • Hi-pot 2E + 1K at 3 mA
  • Flatness: 0.0001" prior to ramp

Drawings



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