Vacuum Ring Heater provides heat to wafers in a degassing chamber in critical semiconductor devices.
Providing uniform heat to wafers in a degassing chamber is critical in extracting impurities from semiconductor devices. BCE’s Vacuum Ring Heater supplies even and efficient heat transfer to achieve the most desirable conditions for such applications. This BCE product is a two part assembly consisting of a SS sheathed heater as the primary heat source, embedded into the machined grooves of an AL6061 ring.
Aerospace lubricants need to be heated and tested in a vacuum for quality assurances that they will work at high altitudes and beyond. This heater is designed as a lower-cost alternative while keeping the identical heat transfer profile and the existing component's excellent vacuum integrity.