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200mm 8" Copper Molybdenum (CuMo) Heater Chuck

200mm 8” Copper Molybdenum (CuMo)  Heater Chuck

Better Uniformity Specifications Than Aluminum With a Higher Temperature Threshold

Having better uniformity specifications than aluminum with a higher temperature threshold, the Copper Molybdenum (CuMo) Heater Chuck displayed stellar performance during ramp-up and heater stabilization.

Thermal conductivity (TC) typically 210 to 255 W/m.K (with rolling process) compared to Aluminum at 205 W/m.K. Using a compressed style configuration, we utilized a 304 stainless steel bottom housing since the uniformity requirement was top end specific. This increased heat transfer towards the top CuMo side while reducing customer cost.

Electrical and Performance Specifications

200mm 8” Stainless Heater Specifications:

  • High temperature up to 850°C
  • Temperature uniformity 550 deg. C (+/-3 deg. C)
  • 108 mtorr, pass best config. baseline (~0.4 torr/min)
  • 120 Volt or 208 Volt Up to 750 Watt (+/-10%)
  • External thermocouple optional
  • Surface Finish: As per customer specification  

200mm 8” Copper Molybdenum (CuMo) Heater Chuck


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