Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Aerospace, University Research, Semiconductor, Medical and OEM Applications

300mm Vacuum Heater Pedestal

300mm Vacuum Heater Pedestal product


Vacuum Heater Pedestal for the manufacturing of 300mm silicon wafers. Temperature needed to be ~650°C in vacuum, 304 stainless steel material with a 2.75 CF Flange at the bottom. Three small top surface steps for lifting the wafers and a tri-pin placement location to keep the wafer from slipping off the heater.


  • Temperature 650°C-700°C
  • CF 2.75 Vacuum Flange on the bottom, pedestal style
  • Helium Leak rate of 1 x 10-9 cc/sec He on complete assembly
  • Thermal break between the top of the heater and the CF flange
  • Thermocouple built-in for over-temp protection or control un-grounded
  • An additional TC for bottom temperature read un-grounded
  • 1900 Watt (± 10%), 240 Volt
  • Mounting threads on the bottom of the assembly
  • Material: 304 Stainless Steel



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