Vacuum Feedthroughs, Heating Elements, and Custom Process Heaters for Aerospace, University Research, Semiconductor, Medical and OEM Applications

Mini Clean Flow - Three Phase

Mini Clean Flow - Three Phase image


The application requirement was a 2" Stainless Steel heater capable of 120 CFM with a 250°C outlet temperature. The inlet temperature was ambient air. The heater required two Conflat Flanges (CF2.75), which could be used in a parallel flow configuration at the customer site. The heater needed to be air tight.

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Mini Clean Flow - Three Phase:
  • Temperature 250°C @ 120CFM using (2) units in a parallel flow pattern
  • Stainless steel 304, all wetted parts
  • Pressure tested to 90 PSI (or equivalent 5 x 10-4 ATM, cc/sec or better)
  • 3-phase with three heated zones
  • (3) independent internal type "K" thermocouples for each zone
  • 11KW (± 10%), 240 Volt, 3-phase (or 1-phase optional)
  • 36" Lead wires for each zone with 12" wire braid for strain relief
  • 304SS CF 2.75 inlet and outlet flange
  • Medium being heated: Air, ambient
  • He Leak Tested = 5 x 10-4 ATM, CC/sec or better


The heater was laser welded on the flanges and brazed on the heater zones. The heater helium leak test passed up to 1 x 10-8 cc/sec in during the testing phase. There were no problems heating ambient air at 2.5CFM to 200°C during the live power test at BCE. The part was cleaned and passed the required 700 Volt DC Hi-pot test for 5 seconds @ 0.5mA.



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